13.5 nm EUV Lithography: Tin Droplet Detection System
- Category:
- Design Support Consulting
When you’re hitting a droplet with enough pulsed CO2 light to generate X-rays efficiently, you have to know exactly when it’s going to cross the focus.
When you’re hitting a droplet with enough pulsed CO2 light to generate X-rays efficiently, you have to know exactly when it’s going to cross the focus.